Patent Assignment
Reel/Frame 014512/0570
Assignment of Assignor's Interest
Recorded: 2003-09-16
Pages: 3
Assignee
AXCELIS TECHNOLOGIES, INC.
55 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915
Covered Property
(1)
Wafer Transport Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.