Patent Assignment
Reel/Frame 014520/0131
Assignment of Assignor's Interest
Recorded: 2003-09-16
Pages: 2
Assignors
IWANAGA, TAKEHIKO
Executed: 2003-09-10
OUTSUKA, KAZUHITO
Executed: 2003-09-10
SHIGARAKI, TOSHIYUKI
Executed: 2003-09-10
Assignee
CANON KABUSHIKI KAISHA
3-30-2, SHIMOMARUKO, OHTA-KU, TOKYO, JAPAN
Covered Property
(1)
Power Monitoring Unit, Control Method Therefor, and Exposure Apparatus