Security Agreement

Recorded: 2003-10-03 Received: 2003-10-09 Pages: 65

Assignor

CELERITY GROUP, INC.

Executed: 2003-09-26

Assignee

TENNENBAUM CAPITAL PARTNERS, LLC

11100 SANTA MONICA BLVD., SUITE 210, LOS ANGELES, CA, 90025, UNITED STATES

Covered Properties (10)

Modular substrate gas panel having manifold connections in a common plane

Application: 60/406,132 →

Variable resistance sensor with common reference leg

Application: 60/397,139 →

Method and Apparatus for Providing a Determined Ratio of Process Fluids

Application: 10/154,433 →

PCT: PCTUS2002016289 ↗

Fluid Flow System

Application: 10/147,427 →

PCT: PCTUS2002015474 ↗

System and Method for a Mass Flow Controller

Application: 10/131,603 →

Gas Panel

Application: 09/939,487 →

Method and apparatus for providing a determined ratio of process fluids

Application: 60/293,356 →

Fluid flow system

Application: 60/291,430 →

System and method for a mass flow controller

Application: 60/285,801 →

Method and Apparatus for Balancing Resistance

Application: 09/783,439 →