Patent Application
Provisional
App. No. 60/406,132
· Confirmation No. 8751
Modular substrate gas panel having manifold connections in a common plane
Inventor:
Kim N. Vu
Provisional Application Expired
Inventors
Kim N. Vu
Yorba Linda, CA
Attorneys & Agents of Record
Prosecution
- Docket No.
- U00128.70036
- Confirmation No.
- 8751
Child
Claims priority from a provisional application
→
App. 11/232,031
· US 7,225,835
Filed 2005-09-21
· Patented Case
Child
Claims priority from a provisional application
→
App. 10/650,102
· US 7,334,605
Filed 2003-08-26
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child
PCT
Claims priority from a provisional application
→
PCT/US2003/026979
Filed 2003-08-26
· RO PROCESSING COMPLETED-PLACED IN STORAGE
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Quick Facts
- App. No.
- 60/406,132
- Filed
- 2002-08-27
External Links