Patent Assignment
Reel/Frame 014541/0604
Assignment of Assignor's Interest
Recorded: 2003-09-29
Pages: 3
Assignor
STEGER, ROBERT J.
Executed: 2003-07-03
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Substrate Support Having Dynamic Temperature Control