Patent Assignment
Reel/Frame 014554/0307
Assignment of Assignor's Interest
Recorded: 2003-09-30
Pages: 3
Assignor
STRANG, ERIC J.
Executed: 2003-09-29
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-8481, JAPAN
Covered Property
(1)
System and Method for Using First-Principles Simulation to Control a Semiconductor Manufacturing Process