Patent Assignment
Reel/Frame 014555/0210
Assignment of Assignor's Interest
Recorded: 2003-10-06
Received: 2003-10-08
Pages: 2
Assignor
WELSER, WOLFGANG
Executed: 2002-10-28
Assignee
INFINEON TECHNOLOGIES AG
ST.-MARTIN-STRASSE 53, MUENCHEN, DEX, 81669, GERMANY
Covered Property
(1)
Fabrication Method and Apparatus for Fabricating a Spatial Structure in a Semiconductor Substrate
Application:
10/281,697 →