Granted Patent
Utility
US 6,660,654
· Confirmation No. 3754
FABRICATION METHOD AND APPARATUS FOR FABRICATING A SPATIAL STRUCTURE IN A SEMICONDUCTOR SUBSTRATE
Inventor:
Wolfgang Welser
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2003-10-06 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2002-10-28 | TRNA |
Transmittal of New Application | 2 | View | |
| 2002-10-28 | SPEC |
Specification | 15 | View | |
| 2002-10-28 | CLM |
Claims | 3 | View | |
| 2002-10-28 | ABST |
Abstract | 2 | View | |
| 2002-10-28 | DRW |
Drawings-only black and white line drawings | 1 | View | |
| 2002-10-28 | OATH |
Oath or Declaration filed | 2 | View |
Inventors
Wolfgang Welser
Kirchheim, GERMANY
Attorneys & Agents of Record
Classification
USPC
438/735
H10B12/0387
C25F3/12
H10P50/613
C25F3/14
Prosecution
- Examiner
- PICARDAT, KEVIN M
- Art Unit
- 2822
- Docket No.
- W&B-INF-1403
- Confirmation No.
- 3754
Foreign Priority
101 53 187.7
·
2001-10-27
·
GERMANY
Publication
- Pub. No.
- US20030082883A1
- Pub. Date
- 2003-05-01
Patent Term Adjustment
-5days
No related applications found.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2015-10-07
from
WELSER, WOLFGANG
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2003-10-06
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Quick Facts
- Patent No.
- US 6,660,654
- App. No.
- 10/281,697
- Filed
- 2002-10-28
- Granted
- 2003-12-09
- Pub. No.
- US20030082883A1
- Examiner
- PICARDAT, KEVIN M
- Art Unit
- 2822
- PTA
- -5 days
External Links