Patent Assignment
Reel/Frame 014565/0189
Assignment of Assignor's Interest
Recorded: 2003-09-30
Pages: 3
Assignor
MITROVIC, ANDREJ S.
Executed: 2003-09-26
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-8481, JAPAN
Covered Property
(1)
System and Method for Using First-Principles Simulation to Characterize a Semiconductor Manufacturing Process
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.