Patent Assignment
Reel/Frame 014586/0513
Assignment of Assignor's Interest
Recorded: 2003-09-30
Pages: 2
Assignors
PHAM, XUYEN
Executed: 2003-09-30
ZHOU, REN
Executed: 2003-09-30
TU, WEN-CHIANG
Executed: 2003-09-30
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
System, Method and Apparatus for Applying Liquid to a Cmp Polishing Pad
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.