Patent Assignment
Reel/Frame 014587/0717
Assignment of Assignor's Interest
Recorded: 2003-10-14
Pages: 2
Assignors
TANAKA, MAKI
Executed: 2003-07-17
SHISHIDO, CHIE
Executed: 2003-07-18
TAKAGI, YUJI
Executed: 2003-07-17
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHISHINBASHI 1-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Method for Determining Etching Process Conditions and Controlling Etching Process
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.