Patent Assignment
Reel/Frame 014591/0985
Assignment of Assignor's Interest
Recorded: 2003-07-08
Pages: 4
Assignees
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN
TAISEI CORPORATION
25-1, NISHI-SHINJUKU 1-CHOME, SHINJUKU-KU, TOKYO 163-0606, JAPAN
Covered Property
(1)
Device and Method for Feeding Treating Air