Patent Assignment
Reel/Frame 014599/0395
Assignment of Assignor's Interest
Recorded: 2003-10-08
Pages: 2
Assignors
AOKI, HIDEMITSU
Executed: 2003-09-30
KASAMA, YOSHIKO
Executed: 2003-09-30
SUZUKI, TATSUYA
Executed: 2003-09-30
Assignee
NEC ELECTRONICS CORPORATION
1753 SHIMONUMABE, NAKAHARA-KU, KAWASAKI, KANAGAWA, 211-8668, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device and Apparatus for Cleaning Substrate
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.