Patent Assignment
Reel/Frame 014603/0290
Assignment of Assignor's Interest
Recorded: 2004-05-05
Pages: 3
Assignors
DETTMANN, WOLFGANG
Executed: 2003-12-19
KOEHLE, RODERICK
Executed: 2003-12-19
VERBEEK, MARTIN
Executed: 2003-12-19
Assignee
INFINEON TECHNOLOGIES AG
ST.-MARTIN STRASSE 53, MUENCHEN, 81669, GERMANY
Covered Property
(1)
Method for Inspection of Periodic Grating Structures on Lithography Masks
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.