Patent Assignment
Reel/Frame 014642/0590
Assignment of Assignor's Interest
Recorded: 2003-10-29
Pages: 3
Assignee
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
1006, OAZA KADOMA, KADOMA-SHI, OSAKA 571-8501, JAPAN
Covered Property
(1)
System and Method for Monitoring Semiconductor Production Apparatus
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.