Patent Assignment
Reel/Frame 014645/0500
Assignment of Assignor's Interest
Recorded: 2003-10-24
Pages: 2
Assignor
KUMAR, DEVENDRA
Executed: 2003-10-15
Assignee
ASM JAPAN K.K.
23-1, 6-CHOME, NAGAYAMA, TAMA-SHI, TOKYO 206-0025, JAPAN
Covered Property
(1)
Method for Manufacturing Semiconductor Device Having Porous Structure with Air-Gaps