Patent Assignment
Reel/Frame 014646/0858
Assignment of Assignor's Interest
Recorded: 2004-05-19
Received: 2004-05-19
Pages: 2
Assignor
PFEIFFER, RICHARD
Executed: 2004-05-13
Assignee
SEMITOOL, INC.
655 WEST RESERVE DRIVE, KALISPELL, MT, 59901, UNITED STATES
Covered Property
(1)
Process for Etching Thin-Film Layers of a Workpiece Used to Form Microelectronic Circuits or Components
Application:
09/999,112 →