Patent Assignment
Reel/Frame 014655/0418
Assignment of Assignor's Interest
Recorded: 2003-10-31
Received: 2003-11-06
Pages: 5
Assignor
ASML US, INC.
Executed: 2003-10-10
Assignee
THERMAL ACQUISITION CORPORATION
440 KINGS VILLAGE ROAD, SCOTTS VALLEY, CA, 95066-4081, UNITED STATES
Covered Property
(1)
Atmospheric Pressure Wafer Processing Reactor Having an Internal Pressure Control System and Method
Application:
10/226,773 →