Patent Assignment
Reel/Frame 014668/0503
Assignment of Assignor's Interest
Recorded: 2004-05-25
Pages: 3
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Processes and device for the deposition of films on substrates
Application:
10/754,151 →
Publication:
US 2005/0150758
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.