Assignment of Assignor's Interest

Recorded: 2004-06-04 Received: 2004-06-04 Pages: 20

Assignor

FIRST DERIVATIVE SYSTEMS, INC.

Executed: 2004-04-28

Assignee

TEGAL CORPORATION

2201 SOUTH MCDOWELL BOULEVARD, PETALUMA, CA, 94954-6903, UNITED STATES

Covered Properties (2)

Cluster Tool with a Hollow Cathode Array

Application: 10/212,293 →

Dual Degas/Cool Loadlock Cluster Tool

Application: 09/798,048 →