IP Library Granted Patent US 6,562,141
Granted Patent Utility Small
US 6,562,141 · Confirmation No. 9701

DUAL DEGAS/COOL LOADLOCK CLUSTER TOOL

⬇ PDF
Code Description Pages PDF
2011-08-11 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2011-08-11 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2011-07-29 PA.. Power of Attorney 2 View
2011-07-29 N417 Electronic Filing System Acknowledgment Receipt 2 View
2001-03-05 TRNA Transmittal of New Application 1 View
2001-03-05 SPEC Specification 23 View
2001-03-05 CLM Claims 4 View
2001-03-05 ABST Abstract 1 View
2001-03-05 DRW Drawings-only black and white line drawings 5 View
2001-03-05 OATH Oath or Declaration filed 2 View
2001-03-05 TRNA Transmittal of New Application 1 View
2001-03-05 SPEC Specification 23 View
2001-03-05 CLM Claims 4 View
2001-03-05 ABST Abstract 1 View
2001-03-05 DRW Drawings-only black and white line drawings 5 View
2001-03-05 OATH Oath or Declaration filed 2 View
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
Patent No.
US 6,562,141
App. No.
09/798,048
Filed
2001-03-05
Granted
2003-05-13
Pub. No.
US20020000194A1
Art Unit
1763
PTA
-42 days