Granted Patent
Utility
Small
US 6,562,141
· Confirmation No. 9701
DUAL DEGAS/COOL LOADLOCK CLUSTER TOOL
Inventor:
Andrew Peter Clarke
|
⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2011-08-11 | N570 |
Communication - Re: Power of Attorney (PTOL-308) | 1 | View | |
| 2011-08-11 | N570 |
Communication - Re: Power of Attorney (PTOL-308) | 1 | View | |
| 2011-07-29 | PA.. |
Power of Attorney | 2 | View | |
| 2011-07-29 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2001-03-05 | TRNA |
Transmittal of New Application | 1 | View | |
| 2001-03-05 | SPEC |
Specification | 23 | View | |
| 2001-03-05 | CLM |
Claims | 4 | View | |
| 2001-03-05 | ABST |
Abstract | 1 | View | |
| 2001-03-05 | DRW |
Drawings-only black and white line drawings | 5 | View | |
| 2001-03-05 | OATH |
Oath or Declaration filed | 2 | View | |
| 2001-03-05 | TRNA |
Transmittal of New Application | 1 | View | |
| 2001-03-05 | SPEC |
Specification | 23 | View | |
| 2001-03-05 | CLM |
Claims | 4 | View | |
| 2001-03-05 | ABST |
Abstract | 1 | View | |
| 2001-03-05 | DRW |
Drawings-only black and white line drawings | 5 | View | |
| 2001-03-05 | OATH |
Oath or Declaration filed | 2 | View |
Inventors
Andrew Peter Clarke
Santa Barbara, CA
Attorneys & Agents of Record
Classification
USPC
118/719
H10P72/0436
H10P72/0454
H10P72/0466
C23C14/564
Prosecution
- Examiner
- HASSANZADEH, PARVIZ
- Art Unit
- 1763
- Customer No.
- 97444
- Docket No.
- 063707-424444
- Confirmation No.
- 9701
Publication
- Pub. No.
- US20020000194A1
- Pub. Date
- 2002-01-03
Patent Term Adjustment
-42days
Parent
is a Division of
→
App. 09/609,733
· US 6,235,656
Filed 2000-07-03
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child
is a Division of
→
App. 10/290,546
Filed 2002-11-08
· Abandoned -- Failure to Respond to an Office Action
Child
PCT
is a Continuation of
→
PCT/US2001/021206
Filed 2001-07-02
· RO PROCESSING COMPLETED-PLACED IN STORAGE
from
OEM GROUP, LLC
SECURITY INTEREST
Recorded 2016-04-05
from
OEM GROUP, INC.
SECURITY AGREEMENT
Recorded 2010-10-08
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2005-03-28
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2004-06-04
from
CLARKE, ANDREW P.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2004-05-18
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Quick Facts
- Patent No.
- US 6,562,141
- App. No.
- 09/798,048
- Filed
- 2001-03-05
- Granted
- 2003-05-13
- Pub. No.
- US20020000194A1
- Examiner
- HASSANZADEH, PARVIZ
- Art Unit
- 1763
- PTA
- -42 days
External Links