Patent Assignment
Reel/Frame 015819/0822
Assignment of Assignor's Interest
Recorded: 2005-03-28
Received: 2005-03-28
Pages: 4
Assignor
FIRST DERIVATIVE SYSTEMS
Executed: 2005-02-25
Assignee
TEGAL CORPORATION
2201 SOUTH MCDOWELL BLVD., PETALUMA, CA, 94954, UNITED STATES
Covered Property
(1)
Dual Degas/Cool Loadlock Cluster Tool
Application:
09/798,048 →