Patent Application
Utility
Small
App. No. 10/290,546
· Confirmation No. 4018
Dual wafer position loadlock chamber
Inventor:
Andrew P. Clarke
Abandoned -- Failure to Respond to an Office Action
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2002-11-08 | TRNA |
Transmittal of New Application | 2 | View | |
| 2002-11-08 | SPEC |
Specification | 21 | View | |
| 2002-11-08 | CLM |
Claims | 5 | View | |
| 2002-11-08 | ABST |
Abstract | 1 | View | |
| 2002-11-08 | DRW |
Drawings-only black and white line drawings | 7 | View | |
| 2002-11-08 | OATH |
Oath or Declaration filed | 3 | View |
Inventors
Andrew P. Clarke
Santa Barbara, CA
Attorneys & Agents of Record
Classification
USPC
156/345.5
H10P72/0436
H10P72/0454
H10P72/0466
C23C14/564
Prosecution
- Examiner
- HASSANZADEH, PARVIZ
- Art Unit
- 1763
- Customer No.
- 24982
- Docket No.
- HM-74422
- Confirmation No.
- 4018
Publication
- Pub. No.
- US20030066606A1
- Pub. Date
- 2003-04-10
No recorded assignments were found for this patent.
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Quick Facts
- App. No.
- 10/290,546
- Filed
- 2002-11-08
- Pub. No.
- US20030066606A1
- Examiner
- HASSANZADEH, PARVIZ
- Art Unit
- 1763
External Links