Patent Assignment
Reel/Frame 014697/0237
Assignment of Assignor's Interest
Recorded: 2003-11-10
Pages: 9
Assignors
KAILASAM, SRIDHAR K.
Executed: 2003-11-04
DREWERY, JOHN
Executed: 2003-11-05
REID, JONATHAN D.
Executed: 2003-11-06
WEBB, ERIC G.
Executed: 2003-11-06
SUKAMTO, JOHANES H.
Executed: 2003-11-06
Assignee
NOVELLUS SYSTEMS, INC.
4000 N. FIRST STREET, SAN JOSE, CALIFORNIA, 95134
Covered Property
(1)
Methods for the Electrochemical Deposition of Copper Onto a Barrier Layer of a Work Piece