Patent Assignment
Reel/Frame 014703/0835
Assignment of Assignor's Interest
Recorded: 2004-06-07
Pages: 7
Assignors
WANG, YUXIANG MAY
Executed: 2004-03-18
RATHI, SUDHA S.R.
Executed: 2004-03-11
KWAN, MICHAEL CHIU
Executed: 2004-03-11
M'SAAD, HICHEM
Executed: 2004-03-18
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Method of Depositing an Amorphous Carbon Film for Etch Hardmask Application