Patent Assignment
Reel/Frame 014704/0173
Assignment of Assignor's Interest
Recorded: 2003-11-17
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-6 AKASAKA 5-CHOME, MINATO-KU, TBS BROADCAST CENTER, TOKYO 107, JAPAN
Covered Property
(1)
Method and Apparatus for Active Temperature Control of Susceptors