Patent Assignment
Reel/Frame 014704/0528
Assignment of Assignor's Interest
Recorded: 2003-11-14
Pages: 3
Assignors
SASAKI, NORIKAZU
Executed: 2003-11-04
KOIZUMI, HIROSHI
Executed: 2003-11-04
AMIKURA, NORIHIKO
Executed: 2003-11-04
Assignee
TOKYO ELECTRON LIMITED
3-6 AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN
Covered Property
(1)
Method and System for Controlling Chiller and Semiconductor Processing System