Patent Assignment
Reel/Frame 014705/0291
Assignment of Assignor's Interest
Recorded: 2003-11-07
Pages: 2
Assignors
PATRICK, ROGER
Executed: 2003-11-03
RICHARDSON, BRETT
Executed: 2003-11-03
WILLIAMS, NORMAN
Executed: 2003-11-03
Assignee
LAM RESEARCH CORPORATION
4750 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Methods and Apparatus for Optimizing a Substrate in a Plasma Processing System