Patent Assignment
Reel/Frame 014705/0330
Security Interest
Recorded: 2003-11-18
Received: 2003-11-21
Pages: 7
Assignor
SCP GLOBAL TECHNOLOGIES, INC.
Executed: 2003-03-14
Assignee
COMERICA BANK, SUCCESSOR BY MERGER TO COMERICA BANK-CALIFORNIA
9920 S. LA CIENEGA BLVD., SUITE 1401, INGLEWOOD, CA, 90301, UNITED STATES
Covered Properties
(3)
Illumination Apparatus for an Optical System and Microscope
Application:
10/795,470 →
Composition and method for removing photoresist and/or resist residue using supercritical fluids
Application:
10/197,384 →
Apparatus and Method for Single Substrate Processing
Application:
10/010,240 →