IP Library Patent Application 10010240
Patent Application Utility
App. No. 10/010,240 · Confirmation No. 5789

APPARATUS AND METHOD FOR SINGLE SUBSTRATE PROCESSING

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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Code Description Pages PDF
2005-01-27 COCOUT Certificate of Correction - Post Issue Communication 1 View
2003-10-28 IFEE Issue Fee Payment (PTO-85B) 3 View
2003-08-22 DRW Drawings-only black and white line drawings 14 View
2003-08-22 LET. Miscellaneous Incoming Letter 1 View
2003-08-04 LET. Miscellaneous Incoming Letter 2 View
2001-12-07 TRNA Transmittal of New Application 4 View
2001-12-07 SPEC Specification 37 View
2001-12-07 CLM Claims 17 View
2001-12-07 ABST Abstract 1 View
2001-12-07 DRW Drawings-only black and white line drawings 14 View
2001-12-07 OATH Oath or Declaration filed 3 View
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Quick Facts
App. No.
10/010,240
Filed
2001-12-07
Granted
2004-04-27
Pub. No.
US20030205559A1
Art Unit
1765
PTA
-283 days