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App. No. 10/826,458 · Confirmation No. 1040

APPARATUS AND METHOD FOR SINGLE SUBSTRATE PROCESSING USING MEGASONIC-ASSISTED DRYING

Abandoned -- Failure to Respond to an Office Action View Publication ↗
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2007-05-10 ABN Abandonment 2 View
2006-08-23 CTAV Advisory Action (PTOL-303) 3 View
2006-08-23 ANE.I Amendment After Final or under 37CFR 1.312, initialed by the examiner. 1 View
2006-08-14 A.NE Response After Final Action 1 View
2006-08-14 CLM Claims 3 View
2006-08-14 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2006-08-14 N417 Electronic Filing System Acknowledgment Receipt 2 View
2006-08-14 WFEE Fee Worksheet (SB06) 1 View
2006-08-01 EXIN Examiner Interview Summary Record (PTOL - 413) 3 View
2006-06-22 CTFR Final Rejection 12 View
2006-06-22 1449 List of References cited by applicant and considered by examiner 1 View
2006-06-22 892 List of references cited by examiner 1 View
2006-06-22 FWCLM Index of Claims 1 View
2006-06-22 SRFW Search information including classification, databases and other search related notes 1 View
2006-04-17 DISQ Terminal Disclaimer review decision 1 View
2006-04-10 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2006-04-10 SPEC Specification 2 View
2006-04-10 CLM Claims 3 View
2006-04-10 REM Applicant Arguments/Remarks Made in an Amendment 6 View
2006-04-10 DRW Drawings-only black and white line drawings 2 View
2006-04-10 DIST Terminal Disclaimer Filed 1 View
2006-04-10 WFEE Fee Worksheet (SB06) 1 View
2006-03-24 N570 Communication - Re: Power of Attorney (PTOL-308) 2 View
2006-02-21 PA.. Power of Attorney 4 View
2006-01-26 CTNF Non-Final Rejection 12 View
2006-01-26 892 List of references cited by examiner 1 View
2006-01-26 1449 List of References cited by applicant and considered by examiner 2 View
2006-01-26 FWCLM Index of Claims 1 View
2006-01-26 BIB Bibliographic Data Sheet 1 View
2006-01-26 SRFW Search information including classification, databases and other search related notes 1 View
2006-01-17 SRNT Examiner's search strategy and results 2 View
2005-12-01 WFEE Fee Worksheet (SB06) 1 View
2005-11-21 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2005-11-21 CLM Claims 4 View
2005-11-21 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2005-10-17 CTRS Requirement for Restriction/Election 5 View
2005-10-17 BIB Bibliographic Data Sheet 2 View
2004-07-30 CFILE Request for Corrected Filing Receipt 4 View
2004-07-30 OATH Oath or Declaration filed 1 View
2004-07-30 A.PE Preliminary Amendment 1 View
2004-07-30 SPEC Specification 1 View
2004-07-30 WFEE Fee Worksheet (SB06) 2 View
2004-07-02 IDS Information Disclosure Statement (IDS) Form (SB08) 5 View
2004-05-07 C.AD Change of Address 1 View
2004-04-16 TRNA Transmittal of New Application 6 View
2004-04-16 SPEC Specification 37 View
2004-04-16 CLM Claims 17 View
2004-04-16 ABST Abstract 1 View
2004-04-16 DRW Drawings-only black and white line drawings 14 View
2004-04-16 OATH Oath or Declaration filed 10 View
2004-04-16 A.PE Preliminary Amendment 1 View
2004-04-16 SPEC Specification 1 View
2004-04-16 CLM Claims 4 View
2004-04-16 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2004-04-16 IDS Information Disclosure Statement (IDS) Form (SB08) 4 View
2004-04-16 WFEE Fee Worksheet (SB06) 1 View
2004-04-16 WFEE Fee Worksheet (SB06) 1 View
2004-04-16 FOR Foreign Reference 16 View
2004-04-16 WCLM Claims Worksheet (PTO-2022) 1 View
2004-04-16 WFEE Fee Worksheet (SB06) 1 View
2004-04-16 FWCLM Index of Claims 1 View
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Quick Facts
App. No.
10/826,458
Filed
2004-04-16
Pub. No.
US20040198051A1
Art Unit
1763