Patent Assignment
Reel/Frame 014708/0352
Assignment of Assignor's Interest
Recorded: 2004-06-08
Pages: 5
Assignors
WANG, SHULIN
Executed: 2004-05-24
SANCHEZ, ERROL ANTONIO C.
Executed: 2004-05-13
CHEN, AIHUA (STEVEN)
Executed: 2004-05-18
Assignee
APPLIED MATERIALS, INC.
P.O. BOX 450-A, LEGAL AFFAIRS DEPARTMENT, SANTA CLARA, CALIFORNIA, 95052
Covered Property
(1)
Method and Apparatus for Forming a High Quality Low Temperature Silicon Nitride Layer