Patent Assignment
Reel/Frame 014711/0015
Assignment of Assignor's Interest
Recorded: 2003-11-17
Pages: 2
Assignors
KIM, TAE-WAN
Executed: 2003-11-12
TOLMACHEV, YURI NIKOLAEVICH
Executed: 2003-11-12
MA, DONG-JOON
Executed: 2003-11-12
NAVALA, SERGIY YAKOVLEVICH
Executed: 2003-11-12
Assignee
SAMSUNG ELECTRONICS CO., LTD.
416 MAETAN-DONG, PALDAL-GU, SUWON-CITY, KYUNGKI-DO,, KOREA, REPUBLIC OF
Covered Property
(1)
Gas Injection Apparatus for Semiconductor Processing System