Patent Assignment
Reel/Frame 014713/0008
Assignment of Assignor's Interest
Recorded: 2003-11-20
Pages: 3
Assignors
HUDYMA, RUSSELL
Executed: 2003-10-16
MANN, HANS-JURGEN
Executed: 2003-10-01
DINGER, UDO
Executed: 2003-10-01
Assignee
CARL ZEISS SMT AG
CARL ZEISS STRASSE 22, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Projection System for Euv Lithography
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.