Patent Assignment
Reel/Frame 014730/0943
Assignment of Assignor's Interest
Recorded: 2003-11-19
Pages: 3
Assignor
FUKIAGE, NORIAKI
Executed: 2003-09-03
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107, JAPAN
Covered Property
(1)
Method and Apparatus for Depositing Materials with Tunable Optical Properties and Etching Characteristics