Patent Assignment
Reel/Frame 014746/0281
Assignment of Assignor's Interest
Recorded: 2003-11-24
Pages: 3
Assignors
SONG, TSING-TANG
Executed: 2003-10-13
CHUANG, CHIH-SHIN
Executed: 2003-11-13
TSENG, WEI-CHAN
Executed: 2003-10-14
HWANG, KUEN-YUAN
Executed: 2003-11-13
CHEN, TSUNG-YU
Executed: 2003-10-16
Assignee
INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
195, CHUNG HSING RD., SEC. 4, CHUTUNG, HSINCHU, R.O.C., TAIWAN
Covered Property
(1)
Photoresist Composition and Method Pattern Forming Using the Same