Patent Assignment
Reel/Frame 014750/0861
Assignment of Assignor's Interest
Recorded: 2003-11-25
Pages: 2
Assignee
ASM JAPAN K.K.
23-1, 6-CHOME, NAGAYAMA, TAMA-SHI, TOKYO, 206-0025, JAPAN
Covered Property
(1)
Method of Manufacturing Silicon Carbide Film