Patent Assignment
Reel/Frame 014752/0426
Assignment of Assignor's Interest
Recorded: 2004-06-18
Pages: 6
Assignors
WONGSENAKHUM, PANYA
Executed: 2004-05-24
FELLIS, AARON R.
Executed: 2004-04-27
ASHTIANI, KAIHAN A.
Executed: 2004-05-05
LEVY, KARL B.
Executed: 2004-05-10
GAO, JUWEN
Executed: 2004-05-13
COLLINS, JOSHUA
Executed: 2004-05-27
SUNG, JUNGHWAN
Executed: 2004-04-29
CHAN, LANA HIULUI
Executed: 2004-04-28
Assignee
NOVELLUS SYSTEMS, INC.
3970 NORTH FIRST STREET, SAN JOSE, CALIFORNIA, 95134
Covered Property
(1)
Method of Forming Low-Resistivity Tungsten Interconnects