Patent Assignment
Reel/Frame 014760/0581
Assignment of Assignor's Interest
Recorded: 2003-12-02
Pages: 2
Assignors
AKIYAMA, KAZUYA
Executed: 2003-11-20
AZUYMA, TORU
Executed: 2003-11-20
KOYAMA, YASUFUMI
Executed: 2003-11-20
Assignee
DAINIPPON SCREEN MFG. CO., LTD.
1-1 TENJINKITAMACHI, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIKYO-KU, KYOTO 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Operation Method Thereof and Program
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.