Patent Assignment
Reel/Frame 014764/0529
Assignment of Assignor's Interest
Recorded: 2004-06-22
Pages: 5
Assignors
NARWANKAR, PRAVIN K.
Executed: 2004-06-11
MINER, GARY
Executed: 2004-06-11
LEPERT, ARNAUD
Executed: 2004-06-18
Assignee
APPLIED MATERIALS, INC.
P.O. BOX 450-A, LEGAL AFFAIRS DEPARTMENT, SANTA CLARA, CALIFORNIA, 95052
Covered Property
(1)
Tailoring Nitrogen Profile in Silicon Oxynitride Using Rapid Thermal Annealing with Ammonia Under Ultra-Low Pressure