Patent Assignment
Reel/Frame 014767/0669
Assignment of Assignor's Interest
Recorded: 2004-06-23
Pages: 5
Assignors
KURITA, SHINICHA
Executed: 2004-04-20
BEER, EMANUEL
Executed: 2004-04-20
KEHRBERG, EDGAR
Executed: 2004-04-20
BRUNNER, MATTHIAS
Executed: 2004-04-20
Assignee
APPLIED MATERIALS, INC.
P.O. BOX 450-A, SANTA CLARA, CALIFORNIA, 95052
Covered Property
(1)
Methods and Apparatus for Determining a Position of a Substrate Relative to a Support Stage