Patent Assignment
Reel/Frame 014786/0166
Assignment of Assignor's Interest
Recorded: 2003-12-11
Pages: 2
Assignor
YAMAZAKI, SHUNPEI
Executed: 2003-12-02
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
398 HASE ATSUGI-SHI, KANAGAWA-KEN 243-0036, JAPAN
Covered Property
(1)
Light-Emitting Device, Film-Forming Method and Manufacturing Apparatus Thereof, and Cleaning Method of the Manufacturing Apparatus