Patent Assignment
Reel/Frame 014806/0874
Assignment of Assignor's Interest
Recorded: 2003-08-15
Pages: 3
Assignors
NEZU, TAKAAKI
Executed: 2003-07-24
HORIGUCHI, KATSUMI
Executed: 2003-07-24
HAYASHI, DAISUKE
Executed: 2003-07-24
TSUKAHARA, TOSHIYA
Executed: 2003-07-24
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN
Covered Property
(1)
Focus Ring for Semiconductor Treatment and Plasma Treatment Device