Patent Assignment
Reel/Frame 014809/0411
Assignment of Assignor's Interest
Recorded: 2003-12-15
Pages: 3
Assignors
RUSU, CAMELIA
Executed: 2003-12-08
DHINDSA, RAJINDER
Executed: 2003-12-09
HUDSON, ERIC A.
Executed: 2003-12-11
SRINIVASAN, MUKUND
Executed: 2003-12-08
LI, LUMIN
Executed: 2003-12-08
KOZAKEVICH, FELIX
Executed: 2003-12-09
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
High Aspect Ratio Etch Using Modulation of Rf Powers of Various Frequencies