Patent Assignment
Reel/Frame 014823/0237
Assignment of Assignor's Interest
Recorded: 2003-12-16
Pages: 2
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Method of Preventing Damage to Porous Low-K Materials During Resist Stripping