Assignment of Assignor's Interest

Recorded: 2003-12-18 Pages: 2

Assignors

SUGIMOTO, HIROAKI

Executed: 2003-11-25

OKUDA, SEIICHIRO

Executed: 2003-11-28

HASHIZUME, AKIO

Executed: 2003-11-25

Assignee

DAINIPPON SCREEN MFG. CO., LTD.

1-1 TENJINKITAMACHI TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIKO-KU, KYOTO 602-8585, JAPAN

Covered Property (1)

Substrate Processing Apparatus for Drying Substrate

Patent: 7,418,970 →

Application: 10/740,711 →

Publication: US 2004/0163683

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.