Patent Assignment
Reel/Frame 014843/0699
Assignment of Assignor's Interest
Recorded: 2003-12-22
Pages: 3
Assignors
GOPALRAJA, PRABURAM
Executed: 2003-09-30
FU, JIANMING
Executed: 2003-09-29
TANG, XIANMIN
Executed: 2003-09-24
FORSTER, JOHN C.
Executed: 2003-09-24
KELKAR, UMESH
Executed: 2003-09-30
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, P.O. BOX 450A, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Self-Ionized and Capacitively-Coupled Plasma for Sputtering and Resputtering