Patent Assignment
Reel/Frame 014844/0754
Assignment of Assignor's Interest
Recorded: 2003-11-25
Pages: 2
Assignors
KWAK, CHANGSOO
Executed: 2002-11-10
LIM, EUL GYOON
Executed: 2002-11-10
KIM, DAE YONG
Executed: 2002-11-10
Assignee
ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
161 GAJEONG-DONG, YUSONG-GU, DAEJEON, KOREA, REPUBLIC OF
Covered Property
(1)
Apparatus for Measuring Gap Between Mask and Substrate Using Laser Displacement Sensor, and Method Thereof