Patent Assignment
Reel/Frame 014847/0715
Assignment of Assignor's Interest
Recorded: 2003-12-22
Pages: 2
Assignor
ZHANG, XIUHUA
Executed: 2003-12-19
Assignee
LAM RSEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Chemical Mechanical Planarization (Cmp) System and Method for Preparing a Wafer in a Cleaning Module
Patent:
7,077,731 →
Application:
10/743,963 →
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.