Patent Assignment
Reel/Frame 014859/0275
Assignment of Assignor's Interest
Recorded: 2003-12-31
Pages: 2
Assignors
KIM, TAE-WAN
Executed: 2003-12-30
TOLMACHEV, YURI NIKOLAEVICH
Executed: 2003-12-30
MA, DONG-JOON
Executed: 2003-12-30
Assignee
SAMSUNG ELECTRONICS CO., LTD.
416 MAETAN-DONG, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, KOREA, REPUBLIC OF
Covered Property
(1)
Inductively Coupled Antenna and Plasma Processing Apparatus Using the Same